Products
Products
Equipped with a mechanism to prevent loosening of the handle due to vibration.
A diaphragm valve with enhanced safety.
The lineup includes the FS-55L (soft resin seat structure) type and the FS-55LMT (metal touch seat structure) type.
FS-55L Series
Stainless Steel Diaphragm Valve
Uses our original 55L structure, which has a track record of reliability. It is compatible with fluorine gas mixture, high-purity helium, high-purity chlorine, and other high-pressure gases. The gland is equipped with a mechanism to prevent handle loosening, to prevent the handle being loosened by the vibration that occurs when using low-pressure liquefied gases.
FS-55LMT (metal touch seat) is ideal for gases that are incompatible with resin or highly corrosive gases.
Features
- The standard model for high-purity gases (specialty gases for semiconductors) with a track record.
- The handle opening and closing operation is light and smooth. A cylinder pressure of 14.7 MPa can be completely shut off by hand.
- The Cv value is no less than 0.3, the reference value for compressed gas valves.
- The body is SUS316L stainless steel.
- Compatible with a variety of fluids: special material gases for semiconductors and liquid crystals such as phosphine and arsine; high-purity, high-pressure gases such as high-purity helium and high-purity chlorine; and liquefied gases such as ammonia.
- A helium leak detector is used to measure the leakage of each piece (internal and external leaks).
- Equipped with a mechanism at the gland to prevent loosening due to vibration.
- Types that allow installation of an orifice inside the outlet are available.
Specification
| Model | FS-55L Series (FS-55LMT Metal Touch Seat Series) |
|---|---|
| Body material | SUS316L |
| Disc seat | PCTFE, PVDF, Metal |
| Max Working pressure | 14.70MPa |
| Temperature range | -20°C — +65°C |
| Flow coefficient Cv |
|
| Helium leak rate | 1.0 x 10-9 Pa・m3/sec |
| For ordering | Type of gas Connections Required regulations and standards If any options and special features |
High Pressure Valves
